Submitted:
16 July 2024
Posted:
17 July 2024
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Abstract
Keywords:
1. Introduction
Materials and Methods
Preparation of Trioctylphosphine Telluride (TOPTe)
Synthesis and Post-Synthesis Processing of p-Type HgTe Colloidal Quantum Dots
Synthesis and Post-Synthesis Processing of n-Type HgTe Colloidal Quantum Dots
Atomic Layer Deposition on Colloidal Quantum Dot Thin Films
| ALD Material | Al2O3 | ZnO | TiO2 | |
| Metal precursor | TMA | DEZ | TDMAT | |
| Reactant | Water | Water | Water | |
| Temperature | 80 C | 80 C | 80 C | |
| 1st half cycle (metal precursor) | N2 flow | 5 sccm | 10 sccm | 10 sccm |
| Metal precursor pulse time | 150 ms | 80 ms | 700 ms | |
| pulse delay | 10 s | 10 s | 10 s | |
| Number of pulses | 6 | 6 | 6 | |
| exposure time | 600, 1200 s | 400 s | 120 s | |
| purge time | 90 s | 90 s | 240, 480 s | |
| 2nd half cycle (water) | N2 flow | 5 sccm | 10 sccm | 5 sccm |
| Water pulse time | 80 ms | 80 ms | 80 ms | |
| water pulse delay | 10 s | 10 s | 10 s | |
| Number of water pulses | 6 | 6 | 6 | |
| exposure time | 400, 800 s | 400 s | 240 s | |
| purge time | 120 s | 120 s | 240, 480 s | |
| Number of cycles | 4, 8, 20 | 8 | 20 |
Characterization of Optical Properties
Conductance and Field Effect Transistor Measurements
Result and Discussion
Conclusions
Supplementary Materials
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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