Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Dynamic Analysis of a MEMS Vibrating Ring Gyroscope

Version 1 : Received: 7 November 2023 / Approved: 8 November 2023 / Online: 8 November 2023 (04:05:07 CET)

How to cite: Gill, W.A.; Howard, I.; Mazhar, I.; McKee, K. Dynamic Analysis of a MEMS Vibrating Ring Gyroscope. Preprints 2023, 2023110506. https://doi.org/10.20944/preprints202311.0506.v1 Gill, W.A.; Howard, I.; Mazhar, I.; McKee, K. Dynamic Analysis of a MEMS Vibrating Ring Gyroscope. Preprints 2023, 2023110506. https://doi.org/10.20944/preprints202311.0506.v1

Abstract

This paper describes developing and analyzing an analytical model of Microelectromechanical Systems (MEMS) internal vibrating ring gyroscope. The internal ring structure consists of eight semicircular beams attached to the externally placed anchors. The paper analyses the vibrating ring gyroscope inplane displacement behavior and the resulting elliptical vibrational modes. The elliptical vibrational modes appear as pairs with the same resonance frequency due to the symmetric nature of the design. The analysis commences by conceptualizing the ring as a geometric structure with a circular shape, possessing specific dimensions such as thickness, height, and radius. We construct a linear model that characterizes the vibrational dynamics of the internal vibrating ring. The analysis encompasses comprehensive mathematical formulations for the radial and tangential displacements in local polar coordinates, considering the inextensional displacement of the ring structure. By utilizing the derived equations, we highlight the underlying relationships driving the vibrational characteristics of the MEMS vibrating ring gyroscope. These dynamic vibrational relationships are essential in enabling the vibrating ring gyroscope's future utilization in accurate navigation and motion sensing technologies.

Keywords

MEMS; MEMS gyroscope; vibrating ring gyroscope; dynamics; motion equations; resonance frequency; ring resonator; inertial sensor

Subject

Engineering, Mechanical Engineering

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