Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Silicon-organic hybrid electro-optic modulator and microwave photonics signal processing applications

Zihan Zhou
,
Meng Chao
,
Xinxin Su
,
Shuanglin Fu
,
Ruonan Liu
,
Zhihua Li
,
Shuhui Bo
ORCID logo ,
Zhuo Chen
* ,
Zhenlin Wu
,
Xiuyou Han
* ORCID logo
Version 1 : Received: 28 September 2023 / Approved: 29 September 2023 / Online: 3 October 2023 (03:23:17 CEST)

A peer-reviewed article of this Preprint also exists.

Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines 2023, 14, 1977. Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines 2023, 14, 1977.

Abstract

Electro-optic modulator (EOM) is one of the key devices of high-speed optical fiber communication system and ultra-wideband microwave photonic system. Silicon-organic hybrid (SOH) integration platform combines the advantages of silicon photonics and organic materials, providing a high electro-optic effect and compact structure for photonic integrated devices. In this paper we present a SOH integrated EOM with comprehensive investigation of EOM structure design, silicon waveguide fabrication with Slot structure, on-chip poling of organic electro-optic material, and characterization of EO modulation response. The SOH integrated EOM is measured with 3dB-bandwidth of over 50 GHz and half-wave voltage length product of 0.26 V·cm. Furthermore, we demonstrate a microwave photonics phase shifter by using the fabricated SOH integrated dual parallel Mach-Zehnder modulator. The phase shift range of 410 degree is completed from 8 GHz to 26 GHz with a power consumption of less than 38 mW.

Keywords

Electro-optic modulator, silicon photonics, silicon-organic hybrid, Mach-Zehnder modulator, slot waveguide

Subject

Physical Sciences, Optics and Photonics

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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