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Reliability Analysis of A MEMS Flow Sensor with Accelerated Degradation Test
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: Received: 18 September 2023 / Approved: 19 September 2023 / Online: 19 September 2023 (08:33:17 CEST)
A peer-reviewed article of this Preprint also exists.
Kang, Q.; Lin, Y.; Tao, J. A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test. Sensors 2023, 23, 8733. Kang, Q.; Lin, Y.; Tao, J. A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test. Sensors 2023, 23, 8733.
Abstract
With the wide application of flow sensor, their reliability under extreme conditions has been concerned in recent years. The reliability of a Micro Electro Mechanical Systems flow sensor under temperature (Ts) is researched in this paper. Firstly, the Step-stress accelerated degradation test is designed. Because this flow sensor consists flow sensor chip and signal processing system, the accelerated degradation testing is implemented, respectively. While the results show that the biggest drift is 3.15% for flow sensor chips with 150℃ conditions, and 32.91% for this flowmeter. By analysis, it could be found that the attenuation of the signal processing system is significant to the degeneration of this flowmeter. The minimum drift of the signal processing system accounts for 82.01% of this flowmeter. Secondly, using the Coffin-Manson model, the relationship between cycle-index and Ts is established. And the lifetime with different Ts is estimated by the Arrhenius model. In addition, the Weibull distribution is applied to evaluate the lifetime distribution. Finally, the reliability function of the Weibull distribution is demonstrated, and the survival rate within one year is 87.69% with 85℃ conditions. Thus, by the application of accelerated degradation testing, the acquired results are innovative and original. This research illustrates the reliability research, which provides a relational database for the application of this flow sensor.
Keywords
Flow sensor; Accelerated degradation testing; Reliability
Subject
Engineering, Electrical and Electronic Engineering
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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