Submitted:
17 August 2023
Posted:
21 August 2023
You are already at the latest version
Abstract
Keywords:
1. Introduction
2. Performance Requirements and Preparation of thin Films
2.1. Performance Requirements
2.1.1. Analysis of the Structure and Working Principle of the Hydraulic Cylinder
2.1.2. Cylinder Failure Analysis
2.1.3. Film Performance Parameters
2.2. Film Preparation
2.3. Characterization
3. Results and Discussion
3.1. Structures and Mechanical Properties of Cu-DLC Film
3.1.1. Structures of Cu-DLC Film
3.1.2. Hardness of Cu-DLC Film
3.2. Tribological Performance of Cu-DLC film
3.2.1. Friction Coefficient and Wear Rate
3.2.2. Raman Analysis of Cu-DLC Film
3.3. Improvement Mechanism of Cu-DLC Film for the Seal Performance
4. Conclusions
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| Sample | Film | Cu sputtering current (mA) | Cu (at%) |
|---|---|---|---|
| A0 | a:C-Cu0% | 0 | 0 |
| A1 | a:C-Cu6.8% | 18 | 6.8 |
| A2 | a:C-Cu9.2% | 35 | 9.2 |
| A3 | a:C-Cu15.4% | 50 | 15.4 |
| A4 | a:C-Cu23.7% | 70 | 23.7 |
| A5 | a:C-Cu32.6% | 90 | 32.6 |
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