Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Effect of Noncircular Channel on Variation of Threshold Voltage in 3D NAND Flash Memory

Donghyun Go
ORCID logo ,
Gilsang Yoon
ORCID logo ,
Jounghun Park
ORCID logo ,
Donghwi Kim
,
Jiwon Kim
,
Jungsik Kim
* ORCID logo ,
Jeong-Soo Lee
*
Version 1 : Received: 2 August 2023 / Approved: 3 August 2023 / Online: 3 August 2023 (10:41:05 CEST)

A peer-reviewed article of this Preprint also exists.

Go, D.; Yoon, G.; Park, J.; Kim, D.; Kim, J.; Kim, J.; Lee, J.-S. Effect of Noncircular Channel on Distribution of Threshold Voltage in 3D NAND Flash Memory. Micromachines 2023, 14, 2007. Go, D.; Yoon, G.; Park, J.; Kim, D.; Kim, J.; Kim, J.; Lee, J.-S. Effect of Noncircular Channel on Distribution of Threshold Voltage in 3D NAND Flash Memory. Micromachines 2023, 14, 2007.

Abstract

Variations in threshold voltage (VTH) and charge distributions in noncircular cells of three-dimensional (3D) NAND flash memory are investigated. The electric field difference in the circular and spike regions causes nonuniform trapped electron density in the charge trap layer (CTL) and influences the VTH variation. Such less-trapped electron (LT) regions in CTL between the circular and spike regions exhibit a lower electric field during the program, resulting in a higher current flow through that region. For the two-spike cells, the charge distribution and VTH variation are analyzed at different heights (HSpike) and angles between spikes. These irregular cells decrease VTH as the HSpike increases.

Keywords

3D NAND flash memory; noncircular cell; spike; TCAD simulation; threshold voltage variation; trapped charge

Subject

Engineering, Electrical and Electronic Engineering

Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Download PDF

Comments (0)

We encourage comments and feedback from a broad range of readers. See criteria for comments and our Diversity statement.

Leave a public comment
Send a private comment to the author(s)
* All users must log in before leaving a comment
Views 0
Downloads 0
Comments 0
Metrics 0
Get PDF Cite Share 0
Bookmark BibSonomy Mendeley Reddit Delicious
×
Alerts
Notify me about updates to this article or when a peer-reviewed version is published.
We use cookies on our website to ensure you get the best experience.
Read more about our cookies here.