Article
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Positioning System of Infrared Sensors Based on ZnO Thin Film
Version 1
: Received: 19 July 2023 / Approved: 19 July 2023 / Online: 20 July 2023 (11:22:58 CEST)
A peer-reviewed article of this Preprint also exists.
Tsai, C.-Y.; Lin, Y.-W.; Ku, H.-M.; Lee, C.-Y. Positioning System of Infrared Sensors Based on ZnO Thin Film. Sensors 2023, 23, 6818. Tsai, C.-Y.; Lin, Y.-W.; Ku, H.-M.; Lee, C.-Y. Positioning System of Infrared Sensors Based on ZnO Thin Film. Sensors 2023, 23, 6818.
Abstract
Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally-insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved through annealing at 500℃ for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 µm over a sensing range of 30 cm. The results show that the voltage signal varies as an inverse exponential function of the distance. A positioning system based on three infrared sensors is implemented in LabVIEW. It is shown that the position estimates obtained using the proposed system are in excellent agreement with the actual locations. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.
Keywords
MEMS; positioning system; pyroelectric infrared sensors; zinc oxide
Subject
Engineering, Electrical and Electronic Engineering
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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