1. Introduction
Sensing technologies based on the magnetic properties of materials have drawn considerable interest due to the advantages of being non-contact and having a low input power requirement, superior energy efficiency, high sensitivity, and robust reliability against adverse environments [
1,
2]. Among the sensors that utilize various magnetic properties of materials, Wiegand sensors are found to be self-powered and stand alone for sensing and energy harvesting simultaneously [
3,
4,
5]. Wiegand sensor is composed of a Wiegand wire that possesses different magnetic properties at the surface layer and the core, a pick-up coil that senses the change in magnetic flux of the Wiegand wire for inducing an output voltage pulse, and an external source of magnetic field to trigger the magnetic reversal of the Wiegand wire [
6,
7].
The pickup coil wound around the Wiegand wire is as shown in the
Figure 1. Essentially, when the external magnetic field is applied in the opposite direction to the magnetization of wire, the magnetization of soft layer will flip first. During this process, there is a change in magnetic flux around the Wiegand wire. This change in the magnetic flux will induce an electromotive force in the pickup coil that can be visualized as a voltage pulse, also called as Wiegand pulse. Since the magnetization reversal of the soft layer in the Wiegand wire is rapid and steep, the magnetization jump in the Wiegand wire is usually called the large Barkhausen jump, and is also known as the Wiegand effect. The pulse generated by the Wiegand sensor will be used as a power supply for equipment without batteries.
The design and adoption of external triggering fields for the Wiegand sensor are limited by the wire-shaped sensing element of the Wiegand wire, which is a critical issue. Recently Lin et. al have thoroughly reviewed the distinctive Wiegand sensor and pointed out that the sophisticated design and fabrication of the triggering magnets are key to widen the application scenarios of Wiegand sensors [
7]. Hard magnetic pole pieces that are capable to provide uniform external fields to trigger a uniform and complete magnetization reversal of the soft layer in the Wiegand wire are essential to maximize the output voltages. Currently, rare-earth magnets are widely used as pole piece materials, but they bring about strong stray fields that lead to electromagnetic interference (EMI) problems. Moreover, typical diameter of the Wiegand wire is 0.25 mm. Using bulk magnets impair the miniaturization capability of the Wiegand sensors. There is an urgent need to investigate the triggering magnets that are able to be compatible with microelectromechanical systems (MEMS) process for Wiegand sensor. In search of some facile materials, electrodeposited Co-rich alloys are potential candidates as hard magnetic pole pieces because they are high-throughput, high-energy-product permanent micro-magnets in a fully integrable and microfabrication-compatible manner.
Electrodeposited Co-rich magnets are promising candidates in MEMS applications such as actuators [
8] in energy generation and harvesting systems [
9], magnetic field sources in magnetic sensors [
10], and magnetic scales in position measurement systems [
11]. The utilisation of hard magnetic materials in MEMS application requires the consideration of cost-effective advantage over commonly used hard magnetic materials like sintered NdFeB. Various thin-film technologies, such as sputtering and molecular beam epitaxy, could be used to deposit thin magnetic films, like Co-based and rare earth alloys such as SmCo [
12], with various magnetic anisotropy configurations. However, due to the limitation of these vacuum processes, only relatively thin layers can be produced, leading to weak magnetic field strength at working distances, which are typically not favored for their respective applications. The fabrication of thick magnetic layers could be realized using atomic layer deposition [
13] technique due to agglomeration of powder magnets. But this process requires the use of rare earth elements to achieve sufficiently high magnetic fields at a given distance due to lower packing density. In search of alternative materials and deposition techniques, electrodeposited Co-based alloys [
10] enables the cost-effective production of thick films and microfabrication manufactured micro-magnets with a high degree of geometric freedom and precision.
Co-based alloy films produced by electrodeposition, including CoP, CoPt, CoNiP, CoMnP, CoWP, CoPtP, and CoNiMnP, hold great promise for use in MEMS [
14,
15,
16]. The magnetic properties of these alloys are significantly influenced by the Co content, grain size, and crystalline texture, which in turn affects the magnetocrystalline anisotropy (MA) [
17] of the deposited films. Additionally, Co-rich alloys deposited by electrodeposition exhibit hard magnetic properties which result from the isolation of fine Co grains by the nonmagnetic elements that are segregated along grain boundaries [
18]. For example, binary CoP alloy yields a high magnetic strength for a low P content and better process control, and the direction of MA can be tailored through the parameters of electrodeposition. Alloying significantly alters the MA of tertiary Co-rich alloys such as the in-plane (IP) type CoNiP alloy [
11] and the out-of-plane (OP) type CoMnP alloy [
19]. The enhancement of the magnetic flux can be realized through the increase in the thickness of the films without altering intrinsic magnetic properties such as MA, magnetization and energy product [
20]. Moreover, Chen et.al., have demonstrated a strategy of multilayer engineering to preserve the OP magnetic properties while enhance the IP properties of the CoMnP alloy [
21,
22]. However, when a thick Co-based hard magnetic layer is microfabrication-patterned and magnetized, shape anisotropy can be the dominant effect depending on the specific geometry. Therefore, developing and improving a specialty magnetization process that yields a well-controlled profile of induction line at the working distances is challenging. In recent years, due to the rise of flexible material technology [
23], magnetic materials have gradually developed towards curved surface magnetism (curvilinear magnetism), and correspondingly emerging magnetization techniques such as origami magnetization have found suitable for MEMS applications [
24,
25].
Flexible permanent magnets play a crucial role in the design of magnetically actuated micro-robots and microsystems that are manipulated through an external magnetic field [
26,
27]. Despite of being important in various applications, flexible permanent magnets pose a significant challenge in achieving optimal magnetic performance due to their ultrathin geometries [
28]. In combination with the microfabrication patterning processes [
10,
15] and the origami techniques [
24], the resultant enhanced magnetic field strength and well-controlled field profile allow for the effective utilization of thin, flexible permanent magnets, which in turn to be promising for the application in the Wiegand sensors. This prompted us to investigate the electrodeposited and origami magnetized Co-rich micro-magnets and evaluate the feasibility of being a triggering magnet for the Wiegand sensors.
The present study explores the potential of microfabrication processed CoNiP micro-magnets by electrodeposition on flexible substrates, which can be utilized to control the profile of stray field by means of origami magnetization. In-depth understanding of the effect of the triggering magnetic fields on the output pulse behaviour of a micro-scale Wiegand sensor is also studied. As a benchmark, we adopted a conventional NdFeB magnet to trigger Wiegand pulse and comparative results have been discussed.
Author Contributions
Conceptualization, C.-C.L.; methodology, G.K., Y.C. and C.-C.L.; software, Y.C.; validation, G.K.; formal analysis, Y.C. and C.-C.L.; investigation, G.K.; resources, C.-C.L.; data curation, Y.C.; writing—original draft preparation, G.K. and C.-C.L.; writing—review and editing, G.K. and C.-C.L.; visualization, G.K. and C.-C.L.; supervision, C.-C.L.; project administration, C.-C.L.; funding acquisition, G.K. and C.-C.L. All authors have read and agreed to the published version of the manuscript.
Figure 1.
Schematic representation of the Wiegand effect.
Figure 1.
Schematic representation of the Wiegand effect.
Figure 2.
(a) The NdFeB magnet, and (b) schematic drawing of the patterned CoNiP magnet, showing the geometries and the definitions of the measurement directions for the magnets. The blue arrows illustrate the Hall sensor sensing directions (out-of-plane (OP) being normal to in-plane (IP) directions), while the red-dot arrows indicate the moving tracks of the Hall sensor tip. In (b), the directions of applied field for magnetization (black arrow) and sample curling for origami (green arrows) are illustrated accordingly.
Figure 2.
(a) The NdFeB magnet, and (b) schematic drawing of the patterned CoNiP magnet, showing the geometries and the definitions of the measurement directions for the magnets. The blue arrows illustrate the Hall sensor sensing directions (out-of-plane (OP) being normal to in-plane (IP) directions), while the red-dot arrows indicate the moving tracks of the Hall sensor tip. In (b), the directions of applied field for magnetization (black arrow) and sample curling for origami (green arrows) are illustrated accordingly.
Figure 3.
Details of the magnetization setups: (a) the C-shaped magnetizing head and the 3D-printed sample holder; (b) 3D CAD model of the sample holder and its exploded-view; (c) sample holder along with a patterned CoNiP sample for annular magnetization.
Figure 3.
Details of the magnetization setups: (a) the C-shaped magnetizing head and the 3D-printed sample holder; (b) 3D CAD model of the sample holder and its exploded-view; (c) sample holder along with a patterned CoNiP sample for annular magnetization.
Figure 4.
Apparatus composed of a Hall sensor, a y-z-θ manual stage and a motorized linear stage for measuring the magnetic flux density profile of the magnets.
Figure 4.
Apparatus composed of a Hall sensor, a y-z-θ manual stage and a motorized linear stage for measuring the magnetic flux density profile of the magnets.
Figure 5.
Schematic drawing showing the setup for Wiegand pulse measurement.
Figure 5.
Schematic drawing showing the setup for Wiegand pulse measurement.
Figure 6.
Measurement results of the magnetic flux density profiles of the NdFeB magnets along (a) the long-side, and (b) the short-side.
Figure 6.
Measurement results of the magnetic flux density profiles of the NdFeB magnets along (a) the long-side, and (b) the short-side.
Figure 7.
Output pulses (presented in stacked format) as a function of flight height: (a) triggered using the long-side of NdFeB magnet, (b) triggered using the short-side of NdFeB magnet.
Figure 7.
Output pulses (presented in stacked format) as a function of flight height: (a) triggered using the long-side of NdFeB magnet, (b) triggered using the short-side of NdFeB magnet.
Figure 8.
Materials characterization results of CoNiP magnets showing (a) the SQUID acquired second quadrant of B-H curve, and (b) the XRD pattern along with the information of JCPDS (Joint Committee on Powder Diffraction Standards) cards for cobalt.
Figure 8.
Materials characterization results of CoNiP magnets showing (a) the SQUID acquired second quadrant of B-H curve, and (b) the XRD pattern along with the information of JCPDS (Joint Committee on Powder Diffraction Standards) cards for cobalt.
Figure 9.
(a) Photo of the patterned CoNiP magnet; and (b) the zoom-in image of the red-rectangular area in (a).
Figure 9.
(a) Photo of the patterned CoNiP magnet; and (b) the zoom-in image of the red-rectangular area in (a).
Figure 10.
Brief measurement of the stray field intensities above the patterned CoNiP magnets: (a) definition of the nine (9) measurement locations; and the stray field intensities (unit in Gauss) in the nine locations of the CoNiP magnets after (b) flat magnetization, (c) curved magnetization, and (d) annular magnetization.
Figure 10.
Brief measurement of the stray field intensities above the patterned CoNiP magnets: (a) definition of the nine (9) measurement locations; and the stray field intensities (unit in Gauss) in the nine locations of the CoNiP magnets after (b) flat magnetization, (c) curved magnetization, and (d) annular magnetization.
Figure 11.
Measurement results of the magnetic flux density profiles along the strip of the patterned CoNiP magnets after (a) curved magnetization, and (b) annular magnetization.
Figure 11.
Measurement results of the magnetic flux density profiles along the strip of the patterned CoNiP magnets after (a) curved magnetization, and (b) annular magnetization.
Figure 12.
(a) Output pulses (presented in stacked format) as a function of flight height triggered using the strip region of the patterned CoNiP magnet by curved magnetization. (b) Comparison of the optimal output pulses (presented in stacked format) triggered by the NdFeB and the patterned CoNiP magnets.
Figure 12.
(a) Output pulses (presented in stacked format) as a function of flight height triggered using the strip region of the patterned CoNiP magnet by curved magnetization. (b) Comparison of the optimal output pulses (presented in stacked format) triggered by the NdFeB and the patterned CoNiP magnets.
Table 1.
The bath compositions and depositing parameters for the electrodeposition of CoNiP magnet.
Table 1.
The bath compositions and depositing parameters for the electrodeposition of CoNiP magnet.
Bath formulation |
Composition |
Concentration (mole/L) |
CoNiP |
CoCl2·6H2O |
0.2 |
NiCl2·6H2O |
0.2 |
NaH2PO2·H2O |
0.3 |
H3BO3
|
0.4 |
NaCl |
0.7 |
Electrodeposition
|
Deposition parameter
|
Settings
|
Galvanic deposition |
Bath volume |
400 ml |
pH value |
4.2 |
Current density (CD) |
20 mA/cm2
|
Temperature |
25°C |
Agitation |
Air bubbling |
Table 2.
Properties of the Wiegand element acquired from the commercial WG631 Wiegand sensor.
Table 2.
Properties of the Wiegand element acquired from the commercial WG631 Wiegand sensor.
Properties of Wiegand element |
External field (G) |
Pulse FWHM (μs)
|
Frequency (kHz) |
Working temperature (°C) |
Nominal minimum |
55 |
10 |
0 |
-40 |
Nominal maximum |
120 |
30 |
5 |
125 |
Table 3.
Characterization results showing the hard magnetic properties in the in-plane and out-of-plane directions of the electrodeposited CoNiP magnets.
Table 3.
Characterization results showing the hard magnetic properties in the in-plane and out-of-plane directions of the electrodeposited CoNiP magnets.
Direction of characterization |
Hci (Oe) |
Ms (G) |
Hc (Oe) |
Br (G) |
(BH)max (MGOe) |
In-plane |
1412 |
18050 |
1083 |
4218 |
1.16 |
Out-of-plane |
1803 |
14550 |
1050 |
2482 |
0.65 |