Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Heterostructure, Morphology, and Adherence Evaluation of TiO2 Film Deposited on Stainless Steel 304 and 316L via Atomic Layer Deposition

Version 1 : Received: 3 February 2023 / Approved: 7 February 2023 / Online: 7 February 2023 (14:00:27 CET)

A peer-reviewed article of this Preprint also exists.

Marques, V.E.C.; Manfroi, L.A.; Vieira, A.A.; Pereira, A.L.J.; Marques, F.C.; Vieira, L. Crystalline Structure, Morphology, and Adherence of Thick TiO2 Films Grown on 304 and 316L Stainless Steels by Atomic Layer Deposition. Coatings 2023, 13, 757. Marques, V.E.C.; Manfroi, L.A.; Vieira, A.A.; Pereira, A.L.J.; Marques, F.C.; Vieira, L. Crystalline Structure, Morphology, and Adherence of Thick TiO2 Films Grown on 304 and 316L Stainless Steels by Atomic Layer Deposition. Coatings 2023, 13, 757.

Abstract

Titanium dioxide (TiO2) thin films have been widely used in transparent optoelectronic devices owing to their excellent optical properties also is used in photocatalysis, cosmetics, and many other biomedical applications. However, a lack of studies was published on microstructure and adherence comparison of the TiO2 deposited on both AISI substrates. In this work, TiO2 thin films were deposited onto AISI 304 and AISI 316L stainless steel (SS) substrates via atomic layer deposition. Its heterostructure, morphology, and adhesion were compared in both substrates looking for synergistic and multifunctional properties. Raman spectroscopy mapping and X-ray diffraction using the Rietveld refinement method showed that the films are composed of anatase and rutile phases in different percentages. Scratching tests were used to analyze the film adher-ence and friction between a diamond tip and TiO2 film, showing well adhered in both substrates.

Keywords

Titanium dioxide; Morphology; Adherence; Heterostructure, AISI304; AISI 316L; Atomic Layer Deposition ALD

Subject

Engineering, Mechanical Engineering

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