Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser

Version 1 : Received: 20 April 2021 / Approved: 21 April 2021 / Online: 21 April 2021 (09:05:14 CEST)

How to cite: Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser. Preprints 2021, 2021040563 (doi: 10.20944/preprints202104.0563.v1). Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser. Preprints 2021, 2021040563 (doi: 10.20944/preprints202104.0563.v1).

Abstract

Two types of trenches cross-section in conventional vertical and brand new reverse-V-shape have fabricated on SCD substrate by micro-jet water-assist laser, the epitaxial lateral overgrowth technique has applied by microwave plasma chemical vapor deposition system in forming multiple micrometer-size channels. Raman and SEM techniques have applied in analyze both types growth layer characterization. Optical microscope has used to test microchannels hollowness. As a result, with the brand new reverse-V-shape trench, epitaxial lateral overgrowth layer reaches higher SCD surface morphology and crystal quality.

Subject Areas

Single crystal diamond; micro-water jet guided laser; microchannel

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