Optical Intensity Far-Field Distribution of MEMS Micro-mirror Arrays by Fraunhofer Diffraction

Compared with liquid crystal clad waveguide, MEMS mirror has some merits, such as high-er-transmissivity, lager-angle of scanning, faster scanning speed and so on. Furthermore, MEMS mirror arrays perform more superior than MEMS mirror when they steer laser beam, which make MEMS arrays much more suitable to be used in devising compact Lidar. Before assembling a Lidar with MEMS arrays, the optical intensity and distributions of the laser diffracted by MEMS arrays should be analyzed, but few published papers about this issue are available so far, this paper will focus on this issue about MEMS arrays. Firstly, the complex amplitudes of laser which is diffracted by 1-D and 2-D arrays are presented, respectively. Then the optical intensity and distributions on the observation plane are presented. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is indirectly verified by Young’s dou-ble-slit experiment. The results gotten in this letter are essential to design a compacted Lidar based on MEMS arrays.