Preprint Communication Version 1 Preserved in Portico This version is not peer-reviewed

Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor

Version 1 : Received: 26 February 2021 / Approved: 1 March 2021 / Online: 1 March 2021 (13:24:14 CET)

How to cite: Listewnik, P.; Bechelany, M.; Szczerska, M. Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints 2021, 2021030013 (doi: 10.20944/preprints202103.0013.v1). Listewnik, P.; Bechelany, M.; Szczerska, M. Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints 2021, 2021030013 (doi: 10.20944/preprints202103.0013.v1).

Abstract

This study presents of the microsphere-based fiber-optic sensor with the ZnO ALD coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100°C to 300°C, with a 10°C step. The interferometric signal is used to control whether the microstructure is intact. Spectrum shift of a reflected signal is used to conclude changes in measured parameter for the sensor with a 100 nm coating, while the reflected signal intensity is an indicator during measurements executed by a sensor with a 200 nm coating. With changing temperature, the peak position or intensity of a reflected signal also changes. The R2 coefficient of the presented sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 0.019 nm/°C for ZnO thickness of 200 nm and 100 nm, respectively.

Subject Areas

temperature sensor; fiber optic sensor; photonic sensor; atomic layer deposition; microsphere; temperature; ZnO

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