Preprint Article Version 1 This version is not peer-reviewed

Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Version 1 : Received: 24 July 2019 / Approved: 25 July 2019 / Online: 25 July 2019 (08:01:27 CEST)

A peer-reviewed article of this Preprint also exists.

Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials 2019, 9, 1218. Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials 2019, 9, 1218.

Journal reference: Nanomaterials 2019, 9, 1218
DOI: 10.3390/nano9091218

Abstract

We report fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on femtosecond laser assisted chemo-mechanical polish which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

Subject Areas

lithium niobate microdisk resonator; controllable wedge angle; high quality factors; chemo-mechanical polish

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