Submitted:
24 July 2019
Posted:
25 July 2019
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Abstract
We report fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on femtosecond laser assisted chemo-mechanical polish which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.
Keywords:
lithium niobate microdisk resonator
; controllable wedge angle
; high quality factors
; chemo-mechanical polish
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