Working Paper Article Version 1 This version is not peer-reviewed

Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond LaserAssisted Chemo-Mechanical Polish

Version 1 : Received: 6 July 2019 / Approved: 8 July 2019 / Online: 8 July 2019 (04:09:54 CEST)

How to cite: Wu, R.; Lin, J.; Wang, M.; Fang, Z.; Chu, W.; Zhang, J.; Zhou, J.; Cheng, Y. Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond LaserAssisted Chemo-Mechanical Polish. Preprints 2019, 2019070100 Wu, R.; Lin, J.; Wang, M.; Fang, Z.; Chu, W.; Zhang, J.; Zhou, J.; Cheng, Y. Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond LaserAssisted Chemo-Mechanical Polish. Preprints 2019, 2019070100

Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 × 6 optical switch, and a balanced 3 × 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.

Subject Areas

lithium niobate; waveguide; photonic integrated circuit; optical lithography; chemo-mechanical polish

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