Preprint Article Version 1 This version is not peer-reviewed

Optimal design of electromagnetically actuated MEMS cantilevers

Version 1 : Received: 29 June 2018 / Approved: 29 June 2018 / Online: 29 June 2018 (15:52:53 CEST)

A peer-reviewed article of this Preprint also exists.

Di Barba, P.; Gotszalk, T.; Majstrzyk, W.; Mognaschi, M.E.; Orłowska, K.; Wiak, S.; Sierakowski, A. Optimal Design of Electromagnetically Actuated MEMS Cantilevers. Sensors 2018, 18, 2533. Di Barba, P.; Gotszalk, T.; Majstrzyk, W.; Mognaschi, M.E.; Orłowska, K.; Wiak, S.; Sierakowski, A. Optimal Design of Electromagnetically Actuated MEMS Cantilevers. Sensors 2018, 18, 2533.

Journal reference: Sensors 2018, 18, 2533
DOI: 10.3390/s18082533

Abstract

In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed structures are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.

Subject Areas

electromagnetically actuated cantilevers; nanometrology; multiobjective optimisation; active cantilevers; SOI-based prototyping

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