Di Barba, P.; Gotszalk, T.; Majstrzyk, W.; Mognaschi, M.E.; Orłowska, K.; Wiak, S.; Sierakowski, A. Optimal Design of Electromagnetically Actuated MEMS Cantilevers. Sensors2018, 18, 2533.
Di Barba, P.; Gotszalk, T.; Majstrzyk, W.; Mognaschi, M.E.; Orłowska, K.; Wiak, S.; Sierakowski, A. Optimal Design of Electromagnetically Actuated MEMS Cantilevers. Sensors 2018, 18, 2533.
In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed structures are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.
electromagnetically actuated cantilevers; nanometrology; multiobjective optimisation; active cantilevers; SOI-based prototyping
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