Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

With the rapid development of MEMS (Micro-electro-mechanical Systems) fabrication technologies, manifolds microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit multi-aspect excellent characteristics beyond stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue and lower fabrication cost. In this paper, we mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, flexible MEMS microelectrodes with fluidic channels and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes for neural interface were described including transparent and stretchable microelectrodes integrated with multi-aspect functions and next-generation electrode-tissue interface modifications facilitated electrode efficacy and safety during implantation. Finally, the combinations among micro fabrication techniques with biomedical engineering and nanotechnology represented by flexible MEMS microelectrodes for neural interface will open a new gate to human lives and understanding of the world.