Preprint Article Version 1 This version not peer reviewed

Hybrid Subtractive-Additive-Welding Microfabrication for Lab-on-Chip (LOC) Applications via Single Amplified Femtosecond Laser Source

Version 1 : Received: 13 April 2017 / Approved: 13 April 2017 / Online: 13 April 2017 (10:32:29 CEST)

A peer-reviewed article of this Preprint also exists.

Linas Jonušauskas, Sima Rekštytė, Ričardas Buividas, Simas Butkus, Roaldas Gadonas, Saulius Juodkazis, Mangirdas Malinauskas, "Hybrid subtractive?additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source," Opt. Eng. 56(9), 094108 (2017) Linas Jonušauskas, Sima Rekštytė, Ričardas Buividas, Simas Butkus, Roaldas Gadonas, Saulius Juodkazis, Mangirdas Malinauskas, "Hybrid subtractive?additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source," Opt. Eng. 56(9), 094108 (2017)

Journal reference: Opt. Eng. 2017, 56, 094108
DOI: 10.1117/1.OE.56.9.094108

Abstract

An approach employing ultrafast laser hybrid subtractive-additive microfabrication combining ablation, 3D nanolithography and welding is proposed for the realization of Lab-On-Chip (LOC) device. Single amplified Yb:KGW fs-pulsed laser source is shown to be suitable for fabricating microgrooves in glass slabs, polymerization of fine-meshes filter out of hybrid organic-inorganic photopolymer SZ2080 inside them, and, lastly, sealing the whole chip with cover glass into a single monolithic piece. The created microfluidic device proved its particle sorting function by separating 1 μm and 10 μm polystyrene spheres in a mixture. All together, this shows that fs-laser microfabrication technology is a flexible and versatile tool for the manufacturing of mesoscale multi-material LOC devices.

Subject Areas

femtosecond laser 3D microfabrication; 3D printing; nanotechnology; microfluidics; lab-on-chip

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