ARTICLE | doi:10.20944/preprints202012.0707.v1
Subject: Materials Science, Biomaterials Keywords: multiphoton lithography; crystalline; 3D nanostructures; ceramic; glass; additive manufacturing
Online: 28 December 2020 (15:44:19 CET)
The current paper is focused on the rapidly developing field of nano-/micro three-dimensional production of inorganic materials. The fabrication method includes laserlithography of hybrid organic-inorganic materials with subsequent heat treatment lead-ing to a variety of crystalline phases in 3D structures. In this work, it was examineda series of organometallic polymer precursors with different silicon (Si) and zirconium (Zr) molar ratios, ranging from 9:1 to 5:5, prepared via sol-gel method. All mixtureswere examined for perspective used in 3D laser by manufacturing by fabricating nano-and micro-feature sized structures. Their deformation and surface morphology wereevaluated depending on chemical composition and crystallographic phase. The appear-ance of a crystalline phase was proven using single-crystal X-ray diffraction analysis,which revealed a lower crystallization temperature for microstructures compared tobulk materials. Fabricated 3D objects retain a complex geometry without any distortion after heat treatment up to 1400oC. Under the proper conditions, a zircon phase (ZrSiO4 - a highly stable material) can be observed. In addition, the highest newrecord of achieved resolution below 60 nm has been reached. The proposed prepara-tion protocol can be used to manufacture micro/nano-devices with high precision andresistance to high temperature and aggressive environment.
CONCEPT PAPER | doi:10.20944/preprints202111.0136.v1
Subject: Physical Sciences, Optics Keywords: laser 3D nanolithography; micro-optics; astrophotonics; 3D printing; additive manufacturing; SZ2080TM; hybrid materials; inorganics; imaging; high temperature.
Online: 8 November 2021 (13:04:13 CET)
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. Ultrafast laser nanolithography is employed for structuring hybrid organic-inorganic material SZ2080TM followed by high-temperature calcination post-processing. The combination allows production of 3D architectures and the heat-treatment results in converting the material to inorganic substance. The produced miniature optical elements are characterized and their optical performance demonstrated. Finally, the concept is validated for manufacturing compound optical components such as stacked lenses. This is opening for new directions and applications of laser made microoptics under harsh conditions such as high intensity radiation, temperature, acidic environment, pressure variations, which include open space, astrophotonics, and remote sensing.