We have investigated the effect of electron-beam irradiation by a forevacuum-pressure plasma-cathode electron source on the surface roughness and hardness of Al2O3- and AlN-based ceramics. The roughness increases with increasing temperature of the processed surface, while the hardness slightly decreases. For aluminum nitride ceramic, we find that the thermal conductivity increases by a factor of 1.5 to 2 depending on the electron-beam irradiation regime.

The results of electron-beam processing of Mn-Zn ferrite samples using pulsed and continuous electron beams in the forevacuum pressure range (10 Pa) are presented. We find that continuous electron-beam processing leads to surface structuring of the ferrite, changes in elemental composition on the surface, and electrical property modification. The degree of ferrite parameter changes exhibits a threshold behavior. For surface processing temperatures below 900 °C, changes are barely noticeable, while for temperatures over 1100 °C the surface resistance decreases by more than an order of magnitude. Electron-beam processing with millisecond pulse duration and pulse energy density exceeding 15 J/cm² results in the formation of low zinc content melt islands, while the remaining surface area (outside the islands) elemental content and ferrite properties remain largely unchanged. The thickness of the modified layer depends on the processing mode and can be controlled over the range 0.1–0.5 mm. Because of its low resistance, the modified layer can be utilized to enhance the RF-absorbing properties of the ferrite.