ARTICLE
|
doi:10.20944/preprints202403.1172.v1
Subject:
Chemistry And Materials Science,
Surfaces, Coatings And Films
Keywords:
magnetron sputtering; gas-charged Si films; microstructural characterization; IBA analysis; XPS and XAS spectroscopic analyses; Ne, Ar and He solid targets
Online: 19 March 2024 (16:05:14 CET)