Submitted:
08 February 2026
Posted:
09 February 2026
You are already at the latest version
Abstract
A new, efficient algorithm for generating monitoring spreadsheets for the optical coating production with monochromatic layer thickness monitoring is presented. Due to its high computational efficiency, it has no limit on the number of different wavelengths used to monitor different groups of deposited coating layers. The algorithm allows for the use of various criteria to select the optimal sequence of monitoring wavelengths. Several examples are provided demonstrating the application of the algorithm to various types of multilayer filters.
Keywords:
thin films
; optical coatings
; monochromatic monitoring
; monitoring spreadsheet
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