Yu, C.; Wu, S.; Zhong, Y.; Xu, R.; Yu, T.; Zhao, J.; Yu, D. Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging. Sensors2024, 24, 171.
Yu, C.; Wu, S.; Zhong, Y.; Xu, R.; Yu, T.; Zhao, J.; Yu, D. Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging. Sensors 2024, 24, 171.
Yu, C.; Wu, S.; Zhong, Y.; Xu, R.; Yu, T.; Zhao, J.; Yu, D. Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging. Sensors2024, 24, 171.
Yu, C.; Wu, S.; Zhong, Y.; Xu, R.; Yu, T.; Zhao, J.; Yu, D. Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging. Sensors 2024, 24, 171.
Abstract
Glass has emerged as a highly versatile substrate for various sensor and MEMS packaging applications, including electromechanical, thermal, optical, biomedical, and RF devices, due to its exceptional properties such as high geometrical tolerances, outstanding heat and chemical resistance, excellent high-frequency electrical properties, and the ability to be hermetically sealed. In these applications, Through-Glass-Via (TGV) plays a vital role in manufacturing and packaging by creating electrical interconnections through glass substrates. This paper provides a comprehensive summary of the research progress in TGV fabrication along with their integrations, including through-via formation and metallization. The paper also reviews the significant qualification and reliability achievements obtained by the scientific community for TGV. Additionally, the paper summarizes the application of TGV technology in various sensors.
Keywords
Through glass via; MEMS sensors; Sensor manufacturing; Sensor packaging
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
