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A Comparative Investigation on Mechanical Properties of Tib2/Cr Multilayer Film by Indentation

A peer-reviewed version of this preprint was published in:
Magnetochemistry 2022, 8(11), 148. https://doi.org/10.3390/magnetochemistry8110148

Submitted:

14 September 2022

Posted:

19 September 2022

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Abstract
Alternating TiB2-dcMS and Cr-HiPIMS layers are used to fabricate TiB2/Cr multilayer films. In-troducing a 5-nm-thick Cr interlayer deposited under a substrate bias of -60 V produces slight increases of both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxially growth on TiB2 interlayer, forming a coherent TiB2/Cr interface. This produces the hardness increasement. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.
Keywords: 
TiB2/Cr
;  
Multilayer
;  
Mechanical properties
;  
Coherent interface
Subject: 
Engineering  -   Mechanical Engineering
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