Submitted:
20 July 2019
Posted:
23 July 2019
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Abstract
We demonstrate fabrication of single-mode optical waveguides on lithium niobate on insulator (LNOI) by optical patterning combined with chemo-mechanical polishing. The fabricated LNOI waveguides have a nearly symmetric mode profile of a mode field size of ~2.5 µm (full-width at half maximum). We develop a high-precision measurement approach by which the single mode waveguides are characterized to have a propagation loss of ~0.042 dB/cm.
Keywords:
lithium niobate
; waveguide
; photonic integrated circuit
; optical lithography
; chemo-mechanical polish
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