Working Paper Article Version 1 This version is not peer-reviewed

Development of Laser Ablation Method for Fabrication of Surface Acoustic Wave Sensors by Using Micro Electric Mechanical System Theory (MEMS)

Version 1 : Received: 22 March 2019 / Approved: 25 April 2019 / Online: 25 April 2019 (15:09:38 CEST)

How to cite: Soliman, A.; Kukae, A. Development of Laser Ablation Method for Fabrication of Surface Acoustic Wave Sensors by Using Micro Electric Mechanical System Theory (MEMS). Preprints 2019, 2019040290 Soliman, A.; Kukae, A. Development of Laser Ablation Method for Fabrication of Surface Acoustic Wave Sensors by Using Micro Electric Mechanical System Theory (MEMS). Preprints 2019, 2019040290

Abstract

The subject of the research is to Development of laser ablation method for Fabrication of surface acoustic wave sensors on quartz wafer, the target of the GQW – is to design Acoustic wave sensor by using laser ablation method. By using the surface acoustic wave theory to sense by the signal and using this physical phenomenon, We will design the sensor which transduce an input electrical signal into a mechanical wave which unlike an electrical signal, can be easily influenced by physical phenomena. The device then transducers this wave back into an electrical signal on the secondary terminal of the sensor. Changes in amplitude, phase, frequency, or time-delay between the input and output electrical signals can be used to measure the presence of the desired Our work in this part, especially the practical part like temperature, vibration ,etc. we design a combs on the waver of quartz to make like an electrode primary electrode & secondary electrode by putting coats of cuppers & vanadium on the waver and then using the fiber optic laser regime to design this combs to can able transfer the signal by ablation the most important here to use the regime of fiber optic laser then we using this sensor in any electronic circuit How we will select the suitable kind of laser to design, this is the most important part, and  what it will be the diameter of that combs of secondary and primary , how much the value of the wave length to select the micro distant combs to avoid any inductance and interference for transferred signal , also take the benefit of using  MEMS theory in our project.

Subject Areas

sensor, acoustic wave, MEMS, laser ablation

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