Optimised Performance of Non-Dispersive Infrared Gas Sensors Using Multilayer Thin Film Bandpass Filters

In this work performance improvements are described of a low power consumption non-dispersive infrared (NDIR) methane (CH₄) gas sensor using customised optical thin film bandpass filters (BPF). BPF’s shape the spectral characteristic of the combined mid infrared III-V based light emitting diode (LED)/ photodiode (PD) light source/detector optopair, enhancing NDIR CH₄ sensor performance. The BPF, deposited using a novel microwave plasma assisted pulsed DC sputter deposition process, is deposited at room temperature directly onto the temperature sensitive PD heterostructure. BPF’s comprise germanium (Ge) and niobium pentoxide (Nb₂O₅) alternating high and low refractive index layers respectively. Two different optical filter designs are progressed; with BPF bandwidths (BWs) of 160 nm and 300 nm. Comparison of modelled and measured NDIR sensor performance is described, highlighting maximized signal to noise ratio (SNR) and minimized cross talk performance benefits. BPF spectral stability for various environmental temperature and humidity conditions is demonstrated.