Article
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Preserved in Portico This version is not peer-reviewed
A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges
Version 1
: Received: 31 July 2017 / Approved: 3 August 2017 / Online: 3 August 2017 (05:50:16 CEST)
A peer-reviewed article of this Preprint also exists.
Li, J.; Liu, H.; Zhao, H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines 2017, 8, 245. Li, J.; Liu, H.; Zhao, H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines 2017, 8, 245.
Abstract
A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on “Z-shaped” flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The “Z-shaped” flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x stage and y stage are lx=17.65 μm and ly=15.45 μm, respectively. The step response time for x stage and y stage are tx=1.7 ms and ty =1.6 ms, respectively.
Keywords
piezoelectric; actuator; nano-positioning; flexure hinge; FEM
Subject
Engineering, Mechanical Engineering
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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