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A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

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Submitted:

31 July 2017

Posted:

03 August 2017

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Abstract
A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on “Z-shaped” flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The “Z-shaped” flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x stage and y stage are lx=17.65 μm and ly=15.45 μm, respectively. The step response time for x stage and y stage are tx=1.7 ms and ty =1.6 ms, respectively.
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Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.

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