Feng, T.; Yu, D.; Wu, B.; Wang, H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines2023, 14, 1222.
Feng, T.; Yu, D.; Wu, B.; Wang, H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines 2023, 14, 1222.
Feng, T.; Yu, D.; Wu, B.; Wang, H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines2023, 14, 1222.
Feng, T.; Yu, D.; Wu, B.; Wang, H. A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. Micromachines 2023, 14, 1222.
Abstract
This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators. Wherein the resonator and the micro-hotplate are manufactured by MEMS technology, then wire-bounded in a package shell at the chip level. The proposed resonator is transduced by the AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5ppm in the range of -50°C to 125°C, and the method also can be applied to other MEMS devices that require temperature control.
Keywords
resonators; OCMR; hotplate; temperature control; MEMS devices
Subject
Engineering, Industrial and Manufacturing Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
