This work presents an LC resonant passive wireless gas sensor with a novel structure designed to mitigate the negative impact of substrate. The LC sensor antenna with the new structure and the reader antenna were designed and optimized utilizing HFSS software to improve the transfer efficiency. The superiority of the designed structure compared with the general ones is highlighted and verified. The change in the substrate capacitance has essentially no interference with the parameters to be measured of the LC sensor. The sensor with the new structure was prepared by combining etching and sputtering methods. The structure of the ZnO nanowires (NWs) was characterized to confirm their high purity and wurtzite crystal structure. The LC gas sensors demonstrated excellent wireless sensing performance including a low detection limit of 0.5 ppm NO2, high response of 1.058 and outstanding stability at 180 °C. The developed new sensor structure not only prevented interference from the substrate during gas sensing testing, but also expanded the choice of sensor substrates, playing a critical role in the development of sensors based on LC resonance principle.
Keywords
LC gas sensor; novel structure; ZnO nanowires; NO2
Subject
Chemistry and Materials Science, Materials Science and Technology
Copyright:
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