Version 1
: Received: 6 October 2017 / Approved: 9 October 2017 / Online: 9 October 2017 (05:20:59 CEST)
How to cite:
Estrada-Martínez, J.L.; Melo-Banda, J.A.; Páramo-García, U.; Reséndiz-Muñoz, J.; Fernández-Muñoz, J.L.; Meléndez-Lira, M.; Zelaya-Ángel, O. Set-Up Method on Properties of BaXSr1-XTiO3 Thin Films Deposited by RF-Magnetron Co-Sputtering by Projecting Temperature and Stoichiometric Effect. Preprints2017, 2017100043 (doi: 10.20944/preprints201710.0043.v1).
Estrada-Martínez, J.L.; Melo-Banda, J.A.; Páramo-García, U.; Reséndiz-Muñoz, J.; Fernández-Muñoz, J.L.; Meléndez-Lira, M.; Zelaya-Ángel, O. Set-Up Method on Properties of BaXSr1-XTiO3 Thin Films Deposited by RF-Magnetron Co-Sputtering by Projecting Temperature and Stoichiometric Effect. Preprints 2017, 2017100043 (doi: 10.20944/preprints201710.0043.v1).
Cite as:
Estrada-Martínez, J.L.; Melo-Banda, J.A.; Páramo-García, U.; Reséndiz-Muñoz, J.; Fernández-Muñoz, J.L.; Meléndez-Lira, M.; Zelaya-Ángel, O. Set-Up Method on Properties of BaXSr1-XTiO3 Thin Films Deposited by RF-Magnetron Co-Sputtering by Projecting Temperature and Stoichiometric Effect. Preprints2017, 2017100043 (doi: 10.20944/preprints201710.0043.v1).
Estrada-Martínez, J.L.; Melo-Banda, J.A.; Páramo-García, U.; Reséndiz-Muñoz, J.; Fernández-Muñoz, J.L.; Meléndez-Lira, M.; Zelaya-Ángel, O. Set-Up Method on Properties of BaXSr1-XTiO3 Thin Films Deposited by RF-Magnetron Co-Sputtering by Projecting Temperature and Stoichiometric Effect. Preprints 2017, 2017100043 (doi: 10.20944/preprints201710.0043.v1).
Abstract
Thin films (100-400 nm) of BaxSr1-xTiO3 (0≤x≤1) deposited in RF-magnetron co-sputtering equipment are presented in this research work. The change of deposition rate, gap energy, and resistivity as a function of temperature- applied power change in the growth parameters was studied through the ISO colour-code lines constructed with MATLAB: By analysing the trend information and take into account the influence of the calculated "x" parameter with the Boltzmann profile fitting is proposed a method to allow a controlled set up of the RF-magnetron co-sputtering system and predict the Eg and resistivity values in the BaxSr1-xTiO3 solid solution with 0≤x≤1 for amorphous and crystalline phases. Also, a versatile tool to optimise the deposition process and material properties.
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
J. L. Estrada-Martínez
,
,