The electrical signal of micro-transducers operating in electrically conductive fluids must be effectively isolated from the surrounding environment while remaining in contact for sensing purposes. A thermally actuated MEMS viscosity sensor uses a buried resistive heat element for actuating a thin silicon membrane whose movement is monitored with embedded piezoresistive elements since the frequency response and behavior of the membrane are used to correlate the viscosity of the fluid being tested. The post-processing materials, (1) Parylene-C, (2) flouroacrylate-based polymer, and (3) nitrocellulose-based polymer, were coated as thin layers of waterproofing materials on different sensors. All three coating materials provided adequate protection when they were used to waterproof the sensors when tested under normal operating conditions. Although the vibration response of the sensors was slightly modified, it did not affect their functionality in a significant way when measuring conductive fluids based on glycerol-water mixtures. All the treated sensors lasted over 1.2 million actuations without any decay in performance or failures. When the test bias conditions were increased by 5x to accelerate failures, the flouroacrylate-based polymer samples lasted 2x longer than the others. Visual analysis of the failures indicates that the edge of the diaphragm, which undergoes the most significant stress and strain values during actuation, was the location of the mechanical failure. This work guides post-processed waterproofing coatings for micro-scale actuators operating in harsh and damaging environments.
Engineering, Electrical and Electronic Engineering
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