In this study, Ni50Ti50 powder was coated on the surface of graphite substrate (C) by plasma spraying process using a radio frequency inductively coupled plasma reactor. The coating was carried out by using 12- and 9-kW power under Ar atmosphere. The cross-section of coating layers and the surface were examined with SEM, EDX, XRD analysis and microhardness test. The thickness and quality of the coating increased with input power. Many pores were detected in the cross-sectional surface areas. Higher input power caused a better coating layer in NiTi alloy. The hardness of the coating layer decreases with higher input power.