Tien, C.; Chiang, C.; Wang, C.; Lin, S. Optical, Electrical, Structural and Thermo-Mechanical Properties of Undoped and Tungsten-Doped Vanadium Dioxide Thin Films. Preprints2024, 2024041196. https://doi.org/10.20944/preprints202404.1196.v1
APA Style
Tien, C., Chiang, C., Wang, C., & Lin, S. (2024). Optical, Electrical, Structural and Thermo-Mechanical Properties of Undoped and Tungsten-Doped Vanadium Dioxide Thin Films. Preprints. https://doi.org/10.20944/preprints202404.1196.v1
Chicago/Turabian Style
Tien, C., Ching-Chiun Wang and Shih-Chin Lin. 2024 "Optical, Electrical, Structural and Thermo-Mechanical Properties of Undoped and Tungsten-Doped Vanadium Dioxide Thin Films" Preprints. https://doi.org/10.20944/preprints202404.1196.v1
Abstract
The undoped and tungsten (W)-doped vanadium dioxide (VO2) thin films were prepared by electron beam evaporation associated with ion-beam assisted deposition (IAD). The influence of different W-doped contents (3%-5%) on the optical, electrical, structural, and thermos-mechanical properties of VO2 thin films was investigated experimentally. Spectral transmittance results showed that with the increase of W-doped contents, the transmittance in the visible light range (400-750 nm) decreases from 60.2% to 53.9%, and the transmittance in the infrared wavelength range (2.5 μm to 5.5 μm) drops from 55.8% to 15.4%. As the W-doped content increases, the residual stress in the VO2 thin film decreases from -0.276 GPa to -0.238 GPa, but the surface roughness increases. For temperature-dependent spectroscopic measurements, heating the VO2 thin films from 30°C to 100°C showed the most significant change in transmittance for the 5% W-doped VO2 thin film. When the heating temperature exceeds 55°C, the optical transmittance drops significantly, and the visible light transmittance drops by about 11%. Finally, X-ray Diffraction (XRD) and scanning electron microscope (SEM) were used to evaluate the microstructure characteristics of VO2 thin films.
Keywords
Vanadium dioxide; thin film; electron beam evaporation; ion-assisted deposition
Subject
Physical Sciences, Optics and Photonics
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
