Version 1
: Received: 25 March 2024 / Approved: 25 March 2024 / Online: 26 March 2024 (10:51:32 CET)
How to cite:
Jabri, I.; Lemaire, E. Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT). Preprints2024, 2024031542. https://doi.org/10.20944/preprints202403.1542.v1
Jabri, I.; Lemaire, E. Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT). Preprints 2024, 2024031542. https://doi.org/10.20944/preprints202403.1542.v1
Jabri, I.; Lemaire, E. Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT). Preprints2024, 2024031542. https://doi.org/10.20944/preprints202403.1542.v1
APA Style
Jabri, I., & Lemaire, E. (2024). Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT). Preprints. https://doi.org/10.20944/preprints202403.1542.v1
Chicago/Turabian Style
Jabri, I. and Etienne Lemaire. 2024 "Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT)" Preprints. https://doi.org/10.20944/preprints202403.1542.v1
Abstract
This paper introduces a low-tech capacitive micromachined ultrasonic transducer (CMUT) designed with low environmental footprint materials. The fabrication process involves a copper plate as the fixed bottom electrode, a polymer-based adhesive as a dielectric material, and an aluminum foil as the top electrode.Finite element simulations include studies of displacement, mechanical stresses, and eigenfrequency. Experimental measurements validate the device's electromechanical behavior, showing an eigenfrequency of 88.6 kHz and a displacement of 22 pm. The low-tech CMUT demonstrates potential for applications such as ultrasonic actuation and energy harvesting, offering simplicity, biocompatibility, and low environmental impact. While not directly ready for applications, these transducers provide hands-on experience with technology similar to high-performance silicon-based implementations. These low-tech MUTs are perfect practical case studies for teaching purposes, combining simulation and experimental validation.
Keywords
ultrasonic actuation; CMUT; finite element simulation; lowtech; ecodesign
Subject
Engineering, Electrical and Electronic Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
