Version 1
: Received: 26 July 2016 / Approved: 26 July 2016 / Online: 26 July 2016 (16:06:33 CEST)
How to cite:
Ezhova, O.; Lysenko, I.; Konoplev, B.; Bondarev, F. Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions. Preprints2016, 2016070080. https://doi.org/10.20944/preprints201607.0080.v1
Ezhova, O.; Lysenko, I.; Konoplev, B.; Bondarev, F. Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions. Preprints 2016, 2016070080. https://doi.org/10.20944/preprints201607.0080.v1
Ezhova, O.; Lysenko, I.; Konoplev, B.; Bondarev, F. Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions. Preprints2016, 2016070080. https://doi.org/10.20944/preprints201607.0080.v1
APA Style
Ezhova, O., Lysenko, I., Konoplev, B., & Bondarev, F. (2016). Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions. Preprints. https://doi.org/10.20944/preprints201607.0080.v1
Chicago/Turabian Style
Ezhova, O., Boris Konoplev and Filipp Bondarev. 2016 "Equilibrium Model of Movable Elements of Micromechanical Devices with Internal Suspensions" Preprints. https://doi.org/10.20944/preprints201607.0080.v1
Abstract
In this work model of mirror elements equilibrium of the micromechanical components is developed, the behavior analysis of the mirror element of micromechanical mirrors in case changing of control voltages of electrostatic actuators is carried out, an expression for determining the maximum value of deflection voltage at which the snap-down effect will take the following form is obtained in case of the influence of the coefficient of the electrostatic rigidity of electrostatic actuators. The developed equilibrium model of mirror elements and the obtained results of modeling can be used at design of micromechanical mirrors with internal suspensions.
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.