Version 1
: Received: 26 April 2024 / Approved: 28 April 2024 / Online: 28 April 2024 (05:18:38 CEST)
How to cite:
Lai, B.; Qi, R.; Zhang, Z.; Wang, Z. Study of Optical Performance and Structure of Yb/Al(1.5wt%Si) and Yb/Al(pure) Multilayers Designed for the 73.6 nm Range. Preprints2024, 2024041805. https://doi.org/10.20944/preprints202404.1805.v1
Lai, B.; Qi, R.; Zhang, Z.; Wang, Z. Study of Optical Performance and Structure of Yb/Al(1.5wt%Si) and Yb/Al(pure) Multilayers Designed for the 73.6 nm Range. Preprints 2024, 2024041805. https://doi.org/10.20944/preprints202404.1805.v1
Lai, B.; Qi, R.; Zhang, Z.; Wang, Z. Study of Optical Performance and Structure of Yb/Al(1.5wt%Si) and Yb/Al(pure) Multilayers Designed for the 73.6 nm Range. Preprints2024, 2024041805. https://doi.org/10.20944/preprints202404.1805.v1
APA Style
Lai, B., Qi, R., Zhang, Z., & Wang, Z. (2024). Study of Optical Performance and Structure of Yb/Al(1.5wt%Si) and Yb/Al(pure) Multilayers Designed for the 73.6 nm Range. Preprints. https://doi.org/10.20944/preprints202404.1805.v1
Chicago/Turabian Style
Lai, B., Zhengbo Zhang and Zhanshan Wang. 2024 "Study of Optical Performance and Structure of Yb/Al(1.5wt%Si) and Yb/Al(pure) Multilayers Designed for the 73.6 nm Range" Preprints. https://doi.org/10.20944/preprints202404.1805.v1
Abstract
The Yb/Al multilayer films exhibit excellent theoretical reflectivity in the 54-90nm wavelength range. This study attempted to incorporate 1.5% wt.% of Si impurities into Al to suppress the crystallization of Al, reduce interfacial roughness, and enhance the actual reflectivity of the prepared Yb/Al multilayer films. The internal microstructure changes of the film layers before and after Si impurity doping were investigated using GIXRR, AFM, and XRD techniques. The reflectivity of two types of multilayer films, Yb/Al(1.5wt.%Si) and Yb/Al(pure), was tested to evaluate the effect of Si impurity on the film performance.
Keywords
Yb/Al multilayer; Si impurity; 54-90nm wavelength range
Subject
Chemistry and Materials Science, Surfaces, Coatings and Films
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.