Lee, B.J.; Hwang, Y.; Jo, D.K.; Jeong, J. A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays. Atmosphere2023, 14, 1220.
Lee, B.J.; Hwang, Y.; Jo, D.K.; Jeong, J. A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays. Atmosphere 2023, 14, 1220.
Lee, B.J.; Hwang, Y.; Jo, D.K.; Jeong, J. A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays. Atmosphere2023, 14, 1220.
Lee, B.J.; Hwang, Y.; Jo, D.K.; Jeong, J. A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays. Atmosphere 2023, 14, 1220.
Abstract
Perfluorinated compounds (PFCs) are used in the manufacturing process of the semiconductor and display industries, and the need for emission reduction is growing as a greenhouse gas with a very large global warming potential. The decomposition characteristics of etch type and water film (WF) type plasma-wet scrubbers were investigated. The PFCs used in the study were CF4, SF6, NF3, CHF3, C2F6, C3F8, and C4F8, and the destruction removal efficiency (DRE) and by-product gas generation rate according to the changes in the parameters (total flow rate and power) of the plasma-wet scrubber were confirmed. When the total flow rate was 100 L/min and the measured maximum power (11 kW), the reduction efficiency of CF4 in the etch type was 95.60 % and the DRE of other PFCs was 99.99 %. And, in the WF type, the DRE of CF4 was 90.06 %, that of SF6 was 96.44 %, and that of other PFCs was 99.99 %. When the total flow rate was 300 L/min and 11 kW, the DRE of SF6 in the etch type was 99 %, and the DRE of NF3, CHF3, C2F6, C3F8, and C4F8 were 99.80 %, 95.34 %, 85.38 %, 88.49 %, and 98.22 %, respectively. And, in the WF type, the DRE of SF6 was 94.39 %, and the DRE of NF3, CHF3, C2F6, C3F8, and C4F8 were 99.80 %, 95.34 %, 85.38 %, 88.49 %, and 98.22 %, respectively. The by-product gas generation rate was significantly lower in the WF type.
Keywords
PFCs; Plasma-wet Scrubber; DRE; By-product
Subject
Environmental and Earth Sciences, Sustainable Science and Technology
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
