Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials2021, 14, 3006.
Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials 2021, 14, 3006.
Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials2021, 14, 3006.
Wei, Q.; Zhang, X.; Lin, F.; Wang, R.; Chen, G.; Wang, H. Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser. Materials 2021, 14, 3006.
Abstract
Two types of trenches cross-section in conventional vertical and brand new reverse-V-shape have fabricated on SCD substrate by micro-jet water-assist laser, the epitaxial lateral overgrowth technique has applied by microwave plasma chemical vapor deposition system in forming multiple micrometer-size channels. Raman and SEM techniques have applied in analyze both types growth layer characterization. Optical microscope has used to test microchannels hollowness. As a result, with the brand new reverse-V-shape trench, epitaxial lateral overgrowth layer reaches higher SCD surface morphology and crystal quality.
Keywords
Single crystal diamond; micro-water jet guided laser; microchannel
Subject
Physical Sciences, Acoustics
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
