Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials2019, 9, 1218.
Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials 2019, 9, 1218.
Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials2019, 9, 1218.
Zhang, J.; Fang, Z.; Lin, J.; Zhou, J.; Wang, M.; Wu, R.; Gao, R.; Cheng, Y. Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator. Nanomaterials 2019, 9, 1218.
Abstract
We report fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on femtosecond laser assisted chemo-mechanical polish which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.
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