Preprint Article Version 2 NOT YET PEER-REVIEWED

Self-Aligned Interdigitated Transducers for Acoustofluidics

  1. Pillar of Engineering Product Development, Singapore University of Technology and Design, Singapore 487372, Singapore
  2. Queensland Micro and Nanotechnology Centre, Griffith University, Brisbane, Queensland 4111, Australia
Version 1 : Received: 16 November 2016 / Approved: 17 November 2016 / Online: 17 November 2016 (10:28:21 CET)
Version 2 : Received: 22 November 2016 / Approved: 22 November 2016 / Online: 22 November 2016 (09:41:32 CET)

A peer-reviewed article of this Preprint also exists.

Ma, Z.; Teo, A.J.T.; Tan, S.H.; Ai, Y.; Nguyen, N.-T. Self-Aligned Interdigitated Transducers for Acoustofluidics. Micromachines 2016, 7, 216. Ma, Z.; Teo, A.J.T.; Tan, S.H.; Ai, Y.; Nguyen, N.-T. Self-Aligned Interdigitated Transducers for Acoustofluidics. Micromachines 2016, 7, 216.

Journal reference: Micromachines 2016, 7, 216
DOI: 10.3390/mi7120216

Abstract

Surface acoustic wave (SAW) is effective for the manipulation of fluids and particles in microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require the full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need of clean room facilities and alignment. The IDTs and microfluidic channels are fabricated in the same process and thus precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation.

Subject Areas

surface acoustic wave; acoustofluidics; microfluidics; interdigitated transducers

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