The problem of health status prediction of insulated-gate bipolar transistors (IGBTs) gains a lot of attention in the field of health management of power electronic equipment. The performance degradation of IGBT gate oxide layer is one of the important failure modes. In view of failure mechanism analysis and easy implementation of monitoring circuit, this paper selects the gate leakage current of IGBT as the precursor parameter of gate oxide degradation, and uses time domain characteristic analysis, gray correlation degree, Mahalanobis distance, Kalman filter and other methods to carry out feature selection and fusion, and finally obtains a health indicator characterizing the degradation of IGBT gate oxide. Based on the Convolutional Neural Network and Long Short-Term Memory (CNN-LSTM) network, this paper constructs an IGBT gate oxide degradation prediction model, and performs experimental analysis on the dataset released by NASA-Ames Laboratory, and the average absolute error of performance degradation prediction is as low as 0.0216. Compared with Long Short-Term Memory (LSTM), Convolutional Neural Network (CNN), Support Vector Regression (SVR) and CNN-LSTM models, CNN-LSTM network has the highest prediction accuracy. These results show the feasibility of gate leakage current as a precursor parameter of IGBT gate oxide layer failure, as well as the accuracy and reliability of the CNN-LSTM prediction model.