Alternating TiB2-dcMS and Cr-HiPIMS layers are used to fabricate TiB2/Cr multilayer films. In-troducing a 5-nm-thick Cr interlayer deposited under a substrate bias of -60 V produces slight increases of both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxially growth on TiB2 interlayer, forming a coherent TiB2/Cr interface. This produces the hardness increasement. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.

Hard coatings like Titanium diboride (TiB2) on silicon substrates are used for interconnects. micro-electro-mechanical devices and metallurgical protective coatings were analyzed based on shallow depths of nanoindentation penetration which involves a change in the nature of the contact from Hertzian to Pyramidal both in loading as well as unloading modes. Features like ductile fracture, linear unloading, and the creation of electrical conduction paths were analyzed. These high-precision features are influenced by the thickness and crystalline nature of the films and are significant for device fabrication.

In order to study the effect of TiB2 particles on the mechanical properties of TiB2/6061Al composites, a series of TiB2/6061Al 3D representative volume element (RVE) were established based on SEM photos. This model took into account the ductile damage of the matrix and the traction separation behavior of the interface, and the linear damage evolution law was introduced to characterize the stiffness degradation behavior of the matrix elements. The mixed boundary conditions were used for RVE tensile experiments, and the accuracy of the predicted result was verified by the agreement of the experimental stress-strain curve. Results show that the addition of TiB2 particles can effectively promote the load-bearing capacity of the composite, but elongation is reduced. With the weight fraction of TiB2 increasing from 2.5% to 12.5%, the elastic modulus, yield strength, and tensile strength are increased by 8%, 10.37%, and 11.55% respectively, while the elongation decreased by 10%. The clustering rate of the TiB2 particles is also an important factor affecting the toughness of the composites. With the increase in the clustering rate of TiB2 particles from 20% to 80%, the load-bearing capacity of the composites is not improved, and the elongation of the composites is reduced by 8%. Moreover, the high strain region provides a fast expansion path for crack propagation and the particle spacing is a crucial factor that affects the stress field.