We report on the application of femtosecond laser micromachining to the fabrication of complex glass microdevices, for high-order harmonic generation in gas. The three-dimensional capabilities and extreme flexibility of femtosecond laser micromachining allow us to achieve accurate control of gas density inside the micrometer interaction channel. This device gives a considerable increase in harmonics generation efficiency if compared with traditional harmonic generation in gas jets. We propose different chip geometries that allow to control the gas density and driving field intensity inside the interaction channel to achieve quasi-phase matching conditions in the harmonic generation process. We believe that these glass micro-devices will pave the way to future downscaling of High-order Harmonic Generation beamlines.

We report on the study of ultrafast laser-induced plasma expansion dynamics in a gas microjet. To this purpose, we focused femtosecond laser pulses on a nitrogen jet produced through a homemade De Laval micronozzle. The laser excitation leads to plasma excitation with a characteristic spectral line emission at 391 nm. By following the emitted signal with a detection system based on an Intensified Charge-Coupled Device (ICCD) we captured the two-dimensional spatial evolution of the photo-excited nitrogen ions with a temporal resolution on the nanosecond time scale. We fabricated the micronozzle on fused silica substrate by femtosecond laser micromachining. This technique enables high accuracy and three-dimensional capabilities, thus providing an ideal platform for developing glass-based microfluidic structures for application to plasma physics and ultrafast spectroscopy.