Light sources tend to affect images captured in any automatic optical inspection (AOI) system. In this study, the effectiveness of metal-halide lamps, quartz-halogen lamps, and LEDs as the light sources in AOI systems for the detection of the 3rd and 4th layers electrodes of thin-film-transistor liquid crystal displays (TFT-LCDs) is examined experimentally. The results show that the performance of LEDs is generally comparable or better than that of metal-halide and quartz-halogen lamps. The best optical performance is by the blue LED due to its spectrum compatibility with the time-delay-integration charged-coupled device (TDI CCD) sensor and its better spatial resolution. The images revealed by the blue LED are sharper and more distinctive. Since current LEDs are more energy efficient and environmentally friendly, using LEDs as the light source for AOI is very beneficial. As the blue LED performs the best, it should be adopted for AOI using TDI CCD sensors.

Among colours, the green has the most sensitivity in human vision so that green defects on displays can be effortlessly perceived by a photopic eye with the most intensity in the wavelength 555 nm of the spectrum. With the market moving forward to high resolution, displays can have resolutions of 10 million pixels. Therefore, the task detects the appearance the panel using ultra-high resolutions in TFT-LCD. The machine vision associated with reflective chromaticity spectrometer quantises the defects are explored, such as blackening and whitening. The result shows the significant phenomena to recognize the non-uniformity film-related chromatic tendency. In contrast, the quantitative assessment illuminates that the chromaticity CIE xyY at 0.001 is a just noticeable difference (JND) and detects even more sensitivity. Moreover, an optical device associated with a 198 Hg discharge lamp calibrates the spectrometer accuracy.

Protrusive defects on the color filter of thin-film transistor (TFT) liquid crystal displays (LCDs) frequently damage the valuable photomask. An fast method using side-view illuminations associated with digital charge-couple devices (CCDs) to detect the protrusive defect in the four substrates, which are the black matrix (BM), red, green, and blue. Between the photomask and substrate, the depth of field (DOF) is normally 300 μm for the proximity-type aligner; we select the four substrates to evaluate the detectability in the task. The experiment is capable of detecting measurements of 300 μm and even lower than 100 μm can be assessed successfully. The maximum error of the measurement is within 6% among the four samples. Furthermore, the uncertainty analysis of three standard deviations is conducted. Thus, the method is cost-effective to prevent damage for valuable photomasks in the flat panel display industry.