ARTICLE
|
doi:10.20944/preprints202109.0384.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
ZRO drift; MEMS gyroscope; internal and packaging stresses; finite element analysis; stress release
Online: 22 September 2021 (13:24:41 CEST)
ARTICLE
|
doi:10.20944/preprints202107.0264.v1
Subject:
Physical Sciences,
Applied Physics
Keywords:
Tuning fork gyroscope; MEMS; 3D packaging; high Q-factors
Online: 12 July 2021 (13:43:38 CEST)
ARTICLE
|
doi:10.20944/preprints202104.0346.v1
Subject:
Engineering,
Electrical And Electronic Engineering
Keywords:
MEMS gyroscopes; circuit phase delay; IQ coupling; real-time correction system
Online: 13 April 2021 (11:16:48 CEST)
ARTICLE
|
doi:10.20944/preprints201612.0147.v1
Subject:
Chemistry And Materials Science,
Nanotechnology
Keywords:
piezoresistive sensor; electron microscope; in situ mechanical test
Online: 30 December 2016 (04:16:25 CET)