TY  - GENERIC
DO  - 10.20944/preprints202103.0013.v1
UR  - http://dx.doi.org/10.20944/preprints202103.0013.v1
TI  - Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor
T2  - Preprints
AU  - Listewnik, Paulina
AU  - Bechelany, Mikhael
AU  - Szczerska, Małgorzata
PY  - 2021
DA  - 2021/03/01
PB  - Preprints