@article{202103.0013,
	doi = {10.20944/preprints202103.0013.v1},
	url = {https://doi.org/10.20944/preprints202103.0013.v1},
	year = 2021,
	month = {March},
	publisher = {Preprints},
	author = {Paulina Listewnik and Mikhael Bechelany and Małgorzata Szczerska},
	title = {Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor},
	journal = {Preprints}
}