@article{202212.0583,
	doi = {10.20944/preprints202212.0583.v1},
	url = {https://doi.org/10.20944/preprints202212.0583.v1},
	year = 2022,
	month = {December},
	publisher = {Preprints},
	author = {Jovan Maksimovic and Haoran Mu and Daniel Smith and Tomas Katkus and Mantas Vaičiulis and Ramūnas Aleksiejūnas and Gediminas Seniutinas and Soon Hock Ng and Saulius Juodkazis},
	title = {Laser Patterned Alumina Mask and Mask-less Dry Etch of Si for Light Trapping},
	journal = {Preprints}
}