TY - GENERIC DO - 10.20944/preprints201812.0268.v1 UR - http://dx.doi.org/10.20944/preprints201812.0268.v1 TI - Back-end-of-the-line MEMS switches for power management, ESD and security T2 - Preprints AU - Tazin, Nusrat AU - Saab, Daniel G. AU - Tabib-Azar, Massood PY - 2018 DA - 2018/12/24 PB - Preprints