TY - GENERIC DO - 10.20944/preprints202308.0655.v2 UR - http://dx.doi.org/10.20944/preprints202308.0655.v2 TI - Facile Synthesis Monodisperse SiO2 Sphere And Their Application Performances in Chemical Mechanical Polishing T2 - Preprints AU - Ge, Jinlong AU - Liu, Lingli AU - Jin, Xiaoqi AU - Zhang, Liyuan AU - Jiao, Yuhong AU - Wang, Qiuqin AU - Wang, Yongkui PY - 2023 DA - 2023/08/15 PB - Preprints